Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5286659 | Method for producing an active matrix substrate | Yasuhiro Mitani, Katsumara Ikubo, Yasunori Shimada, Hirohisa Tanaka, Yutaka Nishi +2 more | 1994-02-15 |
| 5281554 | Method for producing a semiconductor device having a tantalum thin film | Yasunori Shimada | 1994-01-25 |