Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370741 | Dynamic semiconductor wafer processing using homogeneous chemical vapors | — | 1994-12-06 |
| 5357991 | Gas phase semiconductor processor with liquid phase mixing | Timothy J. Reardon, Raymon F. Thompson, Aleksander Owczarz | 1994-10-25 |
| 5332445 | Aqueous hydrofluoric acid vapor processing of semiconductor wafers | — | 1994-07-26 |