Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5320984 | Method for forming a semiconductor film by sputter deposition in a hydrogen atmosphere | Hongyong Zhang, Shunpei Yamazaki | 1994-06-14 |
| 5298749 | Infrared detector utilizing diamond film | — | 1994-03-29 |
| 5283087 | Plasma processing method and apparatus | Shunpei Yamazaki, Mitsunori Tsuchiya, Atsushi Kawano, Shinji Imatou, Kazuhisa Nakashita +2 more | 1994-02-01 |