Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5326720 | Method for producing silicon dioxide film which prevents escape of Si component to the environment | Takuji Goda, Akihiro Hishinuma, Hideo Kawahara, Shigehito Deki | 1994-07-05 |