Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5315092 | Apparatus for heat-treating wafer by light-irradiation and device for measuring temperature of substrate used in such apparatus | Takatoshi Chiba, Kiyofumi Nishii | 1994-05-24 |