Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5308650 | Process and apparatus for the ignition of CVD plasmas | Harald Krummel, Volker Paquet, Helge Vogt, Gunther Weidmann | 1994-05-03 |
| 5300901 | Arrangement for coupling in of microwave energy | Harald Krummel, Helge Vogt, Günter Weidmann | 1994-04-05 |