Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5352899 | Method and apparatus for fabricating a device/circuit pattern by a converging atomic beam | Konstantin S. Golovanivsky | 1994-10-04 |
| 5327475 | Soft x-ray submicron lithography using multiply charged ions | Konstantin S. Golovanivsky | 1994-07-05 |