Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368710 | Method of treating an article with a plasma apparatus in which a uniform electric field is induced by a dielectric window | Ching-Hwa Chen, Duc Tran | 1994-11-29 |
| 5356478 | Plasma cleaning method for removing residues in a plasma treatment chamber | Ching-Hwa Chen, David R. Arnett | 1994-10-18 |