Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5314724 | Process for forming silicon oxide film | Atuhiro Tsukune, Hatanaka Masanobu | 1994-05-24 |
| 5298458 | Method of forming tungsten film | Fumitake Mieno, Toshihiko Ono | 1994-03-29 |