Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5365330 | Foreign particle inspection apparatus | — | 1994-11-15 |
| 5363187 | Light scanning apparatus for detecting foreign particles on surface having circuit pattern | Fuminori Hayano | 1994-11-08 |