Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5306895 | Corrosion-resistant member for chemical apparatus using halogen series corrosive gas | Ryusuke Ushikoshi, Kazuhiro Nobori, Koichi Umemoto, Hiromichi Kobayashi, Toshihiko Honda +1 more | 1994-04-26 |
| 5280156 | Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means | Kazuhiro Nobori, Ryusuke Ushikoshi, Koichi Umemoto | 1994-01-18 |