Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5355219 | Gap control apparatus and method utilizing heterodyne signal phase difference detection | Juro Yasui | 1994-10-11 |
| 5334466 | X-ray mask and process comprising convex-concave alignment mark with alignment reflection film | Juro Yasui | 1994-08-02 |