Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5366917 | Method for fabricating polycrystalline silicon having micro roughness on the surface | Hirohito Watanabe | 1994-11-22 |
| 5284521 | Vacuum film forming apparatus | Ken-ichi Aketagawa, Junro Sakai, Shun Murakami, Hiroyoshi Murota | 1994-02-08 |