Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5371582 | Thickness/depth measuring apparatus and method for measuring the thickness of a film and the depth of a groove | Atsuko Ohkawa, Yasuo Hira, Masayasu Fujisawa, Isao Hashimoto | 1994-12-06 |