Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5369337 | DC or HF ion source | Kenichi Yanagi, Mitsuo Kato, Kazuya Tsurusaki, Kenji Atarashiya, Tadashi Rokkaku +1 more | 1994-11-29 |
| 5288386 | Sputtering apparatus and an ion source | Kenichi Yanagi, Mitsuo Kato, Kazuya Tsurusaki, Kenji Atarashiya, Tadashi Rokkaku +1 more | 1994-02-22 |