Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376497 | Positive quinone diazide sulfonic acid ester resist composition containing select hydroxy compound additive | Shoji Kawata, Toshiaki Fujii, Teturyo Kusunoki, Motofumi Kashiwagi, Hiroshi Yagi +1 more | 1994-12-27 |
| 5306596 | Positive resist composition comprising a polyphenolic o-quinone diazide sulfonate | Masayuki Oie, Shoji Kawata, Takamasa Yamada | 1994-04-26 |