Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5359177 | Microwave plasma apparatus for generating a uniform plasma | Masakazu Taki, Kenji Yoshizawa, Junichi Nishimae | 1994-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5359177 | Microwave plasma apparatus for generating a uniform plasma | Masakazu Taki, Kenji Yoshizawa, Junichi Nishimae | 1994-10-25 |