Issued Patents 1994
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5369464 | Exposure apparatus and an exposure method using the same | — | 1994-11-29 |
| 5367358 | Projection exposing apparatus and projection exposing method | — | 1994-11-22 |
| 5365371 | Projection exposure apparatus | — | 1994-11-15 |
| 5321493 | Apparatus and method for evaluating a projection lens | — | 1994-06-14 |
| 5317450 | Projection exposure apparatus | — | 1994-05-31 |
| 5315349 | Projection aligner | — | 1994-05-24 |
| 5311249 | Projection exposure apparatus | Teruo Miyamoto | 1994-05-10 |
| 5300967 | Projection exposure apparatus | — | 1994-04-05 |
| 5300972 | Projection exposure apparatus | — | 1994-04-05 |
| 5294505 | Pattern forming method | — | 1994-03-15 |
| 5291773 | Apparatus and method for ultrasonic detection of foreign materials in a specimen | — | 1994-03-08 |
| 5287142 | Projection exposure apparatus | — | 1994-02-15 |
| 5285258 | Method of and an apparatus for detecting alignment marks | — | 1994-02-08 |
| 5279911 | Photomask | Hitoshi Nagata | 1994-01-18 |