Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5372850 | Method of manufacturing an oxide-system dielectric thin film using CVD method | Fusaoki Uchikawa, Shigeru Matsuno, Shin-ichi Kinouchi, Toshihisa Honda, Takeharu Kuroiwa +1 more | 1994-12-13 |