Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5328810 | Method for reducing, by a factor or 2.sup.-N, the minimum masking pitch of a photolithographic process | Tyler Lowrey, David A. Cathey | 1994-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5328810 | Method for reducing, by a factor or 2.sup.-N, the minimum masking pitch of a photolithographic process | Tyler Lowrey, David A. Cathey | 1994-07-12 |