Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5346586 | Method for selectively etching polysilicon to gate oxide using an insitu ozone photoresist strip | — | 1994-09-13 |
| 5338395 | Method for enhancing etch uniformity useful in etching submicron nitride features | Debra K. Gould | 1994-08-16 |