Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5324684 | Gas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressure | Ahmad Kermani, Carl Galewski | 1994-06-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5324684 | Gas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressure | Ahmad Kermani, Carl Galewski | 1994-06-28 |