Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5292370 | Coupled microwave ECR and radio-frequency plasma source for plasma processing | Chin-Chi Tsai | 1994-03-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5292370 | Coupled microwave ECR and radio-frequency plasma source for plasma processing | Chin-Chi Tsai | 1994-03-08 |