SF

Susan Fung

DE Digital Equipment: 1 patents #126 of 508Top 25%
🗺 Massachusetts: #885 of 3,963 inventorsTop 25%
Overall (1994): #64,744 of 165,921Top 40%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5330881 Microlithographic method for producing thick, vertically-walled photoresist patterns Alan L. Sidman 1994-07-19