Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374974 | High speed shuttle for gating a radiation beam, particularly for semiconductor lithography apparatus | Michael D. Rostoker, Nicholas F. Pasch | 1994-12-20 |
| 5345310 | Identifying and compensating for slip-plane dislocations in photolithographic mask alignment | Michael D. Rostoker, Nicholas F. Pasch | 1994-09-06 |