Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5348614 | Process for dynamic control of the concentration of one or more reactants in a plasma-enhanced process for formation of integrated circuit structures | — | 1994-09-20 |
| 5326427 | Method of selectively etching titanium-containing materials on a semiconductor wafer using remote plasma generation | — | 1994-07-05 |