Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5318928 | Method for the surface passivation of sensors using an in situ sputter cleaning step prior to passivation film deposition | Rainer Gegenwart, Jochen Ritter, Helmut Stoll, Norbert Weimer | 1994-06-07 |