Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5288572 | Method for monitoring photoresist latent images | Konstantinos P. Giapis, Christian A. Green | 1994-02-22 |
| 5277752 | Method for controlling plasma processes | Eray S. Aydil, Jeffrey Alan Gregus, Mark A. Jarnyk | 1994-01-11 |