Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5277751 | Method and apparatus for producing low pressure planar plasma using a coil with its axis parallel to the surface of a coupling window | — | 1994-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5277751 | Method and apparatus for producing low pressure planar plasma using a coil with its axis parallel to the surface of a coupling window | — | 1994-01-11 |