Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368646 | Reaction chamber design to minimize particle generation in chemical vapor deposition reactors | Arthur K. Yasuda, Randall S. Mundt, James E. Tappan | 1994-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368646 | Reaction chamber design to minimize particle generation in chemical vapor deposition reactors | Arthur K. Yasuda, Randall S. Mundt, James E. Tappan | 1994-11-29 |