Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5291536 | X-ray mask, method for fabricating the same, and pattern formation method | Shinji Sugihara, Ken Murooka | 1994-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5291536 | X-ray mask, method for fabricating the same, and pattern formation method | Shinji Sugihara, Ken Murooka | 1994-03-01 |