Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5375064 | Method and apparatus for moving a material removal tool with low tool accelerations | — | 1994-12-20 |
| 5364496 | Highly durable noncontaminating surround materials for plasma etching | Michael Power, Richard R. Poole, George J. Gardopee | 1994-11-15 |