Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5279980 | Method of manufacturing a thin-film semiconductor device having an alpha-tantalum first wiring member | Shigeru Yamamoto, Ichiro Asai | 1994-01-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5279980 | Method of manufacturing a thin-film semiconductor device having an alpha-tantalum first wiring member | Shigeru Yamamoto, Ichiro Asai | 1994-01-18 |