Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5354632 | Lithography using a phase-shifting reticle with reduced transmittance | Kenny K. Toh, Eng T. Gaw, Rajeev Ranjan Singh | 1994-10-11 |
| 5348826 | Reticle with structurally identical inverted phase-shifted features | Qi-De Qian, Nelson Tam, Eng T. Gaw, Harry Fujimoto | 1994-09-20 |
| 5302477 | Inverted phase-shifted reticle | Ruben A. Rodriguez, Harry Fujimoto | 1994-04-12 |
| 5300379 | Method of fabrication of inverted phase-shifted reticle | Eng T. Gaw, Nelson Tam, Ruben A. Rodriquez | 1994-04-05 |