Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5277750 | Method for anisotropic dry etching of metallization layers, containing aluminum or aluminum alloys, in integrated semiconductor circuits | — | 1994-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5277750 | Method for anisotropic dry etching of metallization layers, containing aluminum or aluminum alloys, in integrated semiconductor circuits | — | 1994-01-11 |