Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5366850 | Submicron planarization process with passivation on metal line | Kuang-Chao Chen | 1994-11-22 |
| 5356836 | Aluminum plug process | Kuang-Chao Chen | 1994-10-18 |
| 5286675 | Blanket tungsten etchback process using disposable spin-on-glass | Kuang-Chao Chen | 1994-02-15 |