Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5299393 | Slurry containment device for polishing semiconductor wafers | LaVerne B. Jacobson, Robert D. Johnson, Steven E. Monahan | 1994-04-05 |
| 5279926 | Method and apparatus for removing vapor from a pressurized sprayed liquid in the manufacture of semiconductor integrated circuits | Robert D. Johnson, Steven E. Monahan, Ronald Wayne Olson | 1994-01-18 |