Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5354382 | Electron cyclotron resonance apparatus comprising wafer cooling pedestal | Roh Y. Sung, Chel Park, Sang Yong Lee, Dae Hwan Kim | 1994-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5354382 | Electron cyclotron resonance apparatus comprising wafer cooling pedestal | Roh Y. Sung, Chel Park, Sang Yong Lee, Dae Hwan Kim | 1994-10-11 |