Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5365031 | Apparatus and method for shielding a workpiece holding mechanism from depreciative effects during workpiece processing | — | 1994-11-15 |
| 5337150 | Apparatus and method for performing thin film layer thickness metrology using a correlation reflectometer | — | 1994-08-09 |
| 5292400 | Method and apparatus for producing variable spatial frequency control in plasma assisted chemical etching | — | 1994-03-08 |