Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5336355 | Methods and apparatus for confinement of a plasma etch region for precision shaping of surfaces of substances and films | Charles B. Zarowin | 1994-08-09 |
| 5290382 | "Methods and apparatus for generating a plasma for ""downstream"" rapid shaping of surfaces of substrates and films" | Charles B. Zarowin | 1994-03-01 |
| 5291415 | Method to determine tool paths for thinning and correcting errors in thickness profiles of films | Charles B. Zarowin | 1994-03-01 |