Issued Patents 1994
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374456 | Surface potential control in plasma processing of materials | Robert W. Schumacher, David M. Pepper | 1994-12-20 |
| 5346600 | Plasma-enhanced magnetron-sputtered deposition of materials | Simon K. Nieh, Frans G. Krajenbrink | 1994-09-13 |
| 5330800 | High impedance plasma ion implantation method and apparatus | Robert W. Schumacher, Dan M. Goebel | 1994-07-19 |
| 5303574 | Evaluation of the extent of wear of articles | Paul H. Mikkola, John L. Bartelt | 1994-04-19 |
| 5296272 | Method of implanting ions from a plasma into an object | Dan M. Goebel | 1994-03-22 |