Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5365340 | Apparatus and method for measuring the thickness of thin films | — | 1994-11-15 |
| 5333049 | Apparatus and method for interferometrically measuring the thickness of thin films using full aperture irradiation | — | 1994-07-26 |
| 5293214 | Apparatus and method for performing thin film layer thickness metrology by deforming a thin film layer into a reflective condenser | — | 1994-03-08 |
| 5291269 | Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations | — | 1994-03-01 |