Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5336029 | Loading apparatus having a suction-hold mechanism | Naoki Kato, Eiji Konoshima, Kyoji Kinokiri | 1994-08-09 |
| 5336385 | Sputtering apparatus | Yuichiro Shimose | 1994-08-09 |
| 5324087 | Sucked substrate detecting apparatus | Yuichiro Shimose | 1994-06-28 |