Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5349762 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1994-09-27 |
| 5320982 | Wafer cooling method and apparatus | Naoyuki Tamura, Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1994-06-14 |
| 5314509 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1994-05-24 |