Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376777 | Control apparatus and method for a substrate tray on an in-line sputtering apparatus | Eiji Setoyama | 1994-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376777 | Control apparatus and method for a substrate tray on an in-line sputtering apparatus | Eiji Setoyama | 1994-12-27 |