Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5314839 | Solid state device fabrication method including a surface treatment step with a neutral particle beam with an energy between 10ev and 100ev | Tatsumi Mizutani, Takashi Yunogami, Nobuyoshi Kobayashi | 1994-05-24 |