Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5358806 | Phase shift mask, method of correcting the same and apparatus for carrying out the method | Satoshi Haraichi, Fumikazu Itoh, Akira Shimase, Hiroshi Yamaguchi, Yasuhiro Koizumi | 1994-10-25 |
| 5342448 | Apparatus for processing a sample using a charged beam and reactive gases | Yuuichi Hamamura, Satoshi Haraichi, Akira Shimase, Fumikazu Itoh, Toshio Yamada +2 more | 1994-08-30 |