Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5352324 | Etching method and etching apparatus therefor | Yasushi Gotoh, Tokuo Kure, Hiroshi Kawakami, Masanori Katsuyama, Kiyomi Yagi | 1994-10-04 |
| 5331191 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1994-07-19 |