Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5316983 | Apparatus for analysis of particulate material, analytical method for same, apparatus for production of ultrapure water, apparatus for manufacturing of semiconductor, and apparatus for production of pure gas | Tetsuya Matsui, Taiko Ajiro, Kenji Yokose, Shigeru Izumi | 1994-05-31 |