Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5347100 | Semiconductor device, process for the production thereof and apparatus for microwave plasma treatment | Takuya Fukuda, Michio Ohue, Atsuyoshi Koike, Katsuaki Saito, Kazuo Suzuki | 1994-09-13 |